Characterization of optical UV ®lters using Rutherford backscattering spectroscopy

Rutherford backscattering spectroscopy (RBS) has been used during the development of multilayer thin ®lm optical ®lters, especially designed for the ̄uorescence detector of the Pierre AUGER Project. Depth pro®les of the heavy components have been measured directly, while reliable results for the light components could also be extracted indirectly. Relative thickness and density of the individual layers and deviations from the desired thickness and stoichiometry have been deduced. The ®ndings of the RBS method have been compared and discussed with results obtained by other characterization techniques. Ó 2000 Elsevier Science B.V. All rights reserved.